Four-axes stage for low-noise AFM CD measurements

Posted 20-02-12 18:09 | Permalink: www.nanotools.com/blog/four-axes-stage-for-low-noise-afm-cd-measurements.html

Publication update:

nanotools CDR30-EBD and HAR probes featured in research article

Discover how nanotools CDR30-EBD and High Aspect Ratio (HAR) probes are applied to study tip wear, repeatability and reproducibility of CD measurements.

Title: A position-controllable external stage for critical dimension measurements via low-noise atomic force microscopy
DOI: 10.1016/j.ultramic.2018.07.005
Authors: Moon, Seunghyun, Kim, Jung-Hwan, Kim, Ju-Hwang, Kim, Youn Sang, Shin, ChaeHo
Publication: Ultramicroscopy
Publisher: Elsevier
Date: November 2018

Visit Ultramicroscopy for details (external link)

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